Nano Bugle

A window into applied science supported by INL

Our Scientific Infrastructure

It is time to tell you a little more about our scientific infrastructure. At the INL we consider them very important because they will help us on the one hand to define the Research Personality of the INL and on the other to attract scientists all over the world with enough skills and abilities to join our organization.


INL facilities will encompass,


  • A) Central Micro and Nanofabrication Clean Room: (Class 100 and 1000 ) with a 400m2 useful area, with an expansion capability to 600m2. The gross clean room area ( bay and chase) is around 1100 m2. The nanolithography area is specially designed to VC-E vibration specifications to accommodate two e-beam tools ( 10nm or better feature resolution), and a nano-imprint tool . The optical lithography bay will include a direct write laser tool (Heidelberg Instruments FB6) and mask aligners. The tools being envisaged are the VISTEC EPSG5000 plus, and the RAITH e-line. The clean-room will include two isolated bays , one for nanobio related microfabrication, and the other for eventual processes or tools requiring proper contamination control. The deposition and each bay where the noisiest equipment is present is placed as far as possible from the critical nanolithography area. All tools are able to process up to 6 inch diameter wafers. The clean room is prepared to house a couple of larger tools capable of handling larger wafers, in case these tools become available.


  • B) Specialized labs with VC-E or better vibration specifications and particular EMI shielding requirements

This area, at level -1, will be where the critical imaging and characterization tools will be placed ( HRTEM, dual beam FIB/FEG, surface analysis cluster, UHV-AFM/STM, …). Since some of these tools will depend on the particular PI being recruited, this space will be configured with the possible flexibility, incorporating 80 cm deep wells in each room for placement of isolated concrete blocks, raised on compressed air springs. This will allow raising the blocks from the ground slab (2m thick), or bringing these blocks in contact with the ground slab, depending on the vibration specifications of the tools to be installed.  These labs will also have particular acoustic, temperature and humidity specifications.  

A Central Scanning Probe Microscopy Laboratory: This laboratory will support SPM activity from standard imaging to advanced interdisciplinary applications and development of new techniques.

  • C) Central Biology and Biochemistry facility: to provide support for groups developing biology and biochemistry activity. This laboratory will have capability for cell culture, DNA manipulation, microspotting, etc…
  • D) Central Structural and Interface Characterization Laboratory: This laboratory will allow in-house detailed structural characterization of thin films, interfaces, and nanostructures ( X-ray, Auger/SIMS, …)

Additionally INL will have 22 to 24 wet and dry PI labs that will be gradually equipped as PIs join INL (spintronics, NEMS, photonics, high frequency device characterization, nanomaterial synthesis labs, etc…).

Last but not the least, the INL campus will also provide space and place for the design of prototypes and facilities for the establishment of spin-off companies as well as technical workshop place for glass, electronic, mechanic, cryogenics and other technical departments.

The conclusion on the INL Campus is predicted to occur in the Fall of 2009, and will represent an important milestone in the laboratory’s still very brief history. By the end of 2009, some of the laboratories are expected to be fully operational, so that research work can take place at INL. 

September 17, 2008 - Posted by | INL Project

1 Comment »

  1. Not that I’m impressed a lot, but this is more than I expected for when I found a link on Delicious telling that the info here is awesome. Thanks.

    Comment by How to Get Six Pack Fast | April 15, 2009 | Reply

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